diff --git a/src/coreclr/tools/aot/ILCompiler.Compiler/Compiler/ILAssemblyGeneratingMethodDebugInfoProvider.cs b/src/coreclr/tools/aot/ILCompiler.Compiler/Compiler/ILAssemblyGeneratingMethodDebugInfoProvider.cs
index 99fdafcd936b8..9261a98a8ae38 100644
--- a/src/coreclr/tools/aot/ILCompiler.Compiler/Compiler/ILAssemblyGeneratingMethodDebugInfoProvider.cs
+++ b/src/coreclr/tools/aot/ILCompiler.Compiler/Compiler/ILAssemblyGeneratingMethodDebugInfoProvider.cs
@@ -28,7 +28,7 @@ public ILAssemblyGeneratingMethodDebugInfoProvider(string fileName, DebugInforma
         {
             _wrappedProvider = wrappedProvider;
             _fileName = fileName;
-            _tw = new StreamWriter(File.OpenWrite(fileName));
+            _tw = new StreamWriter(new FileStream(fileName, FileMode.Create, FileAccess.Write, FileShare.None));
         }
 
         public override MethodDebugInformation GetDebugInfo(MethodIL methodIL)
diff --git a/src/tasks/MonoTargetsTasks/RuntimeConfigParser/RuntimeConfigParser.cs b/src/tasks/MonoTargetsTasks/RuntimeConfigParser/RuntimeConfigParser.cs
index 3430fb09f72b2..8a047ecc6205c 100644
--- a/src/tasks/MonoTargetsTasks/RuntimeConfigParser/RuntimeConfigParser.cs
+++ b/src/tasks/MonoTargetsTasks/RuntimeConfigParser/RuntimeConfigParser.cs
@@ -71,7 +71,7 @@ public override bool Execute()
         ConvertDictionaryToBlob(configProperties, blobBuilder);
 
         Directory.CreateDirectory(Path.GetDirectoryName(OutputFile!)!);
-        using var stream = File.OpenWrite(OutputFile);
+        using var stream = new FileStream(OutputFile, FileMode.Create, FileAccess.Write, FileShare.None);
         blobBuilder.WriteContentTo(stream);
 
         return !Log.HasLoggedErrors;
diff --git a/src/tasks/WasmAppBuilder/WasmAppBuilderBaseTask.cs b/src/tasks/WasmAppBuilder/WasmAppBuilderBaseTask.cs
index b5a6539e2cb87..c533e404c4173 100644
--- a/src/tasks/WasmAppBuilder/WasmAppBuilderBaseTask.cs
+++ b/src/tasks/WasmAppBuilder/WasmAppBuilderBaseTask.cs
@@ -152,7 +152,7 @@ protected virtual void UpdateRuntimeConfigJson()
         AddToRuntimeConfig(wasmHostProperties: wasmHostProperties, runtimeArgsArray: runtimeArgsArray, perHostConfigs: perHostConfigs);
 
         string dstPath = Path.Combine(AppDir!, Path.GetFileName(runtimeConfigPath));
-        using FileStream? fs = File.OpenWrite(dstPath);
+        using FileStream? fs = new FileStream(dstPath, FileMode.Create, FileAccess.Write, FileShare.None);
         using var writer = new Utf8JsonWriter(fs, new JsonWriterOptions { Indented = true });
         rootObject.WriteTo(writer);
         _fileWrites.Add(dstPath);
diff --git a/src/tasks/WasmBuildTasks/GetChromeVersions.cs b/src/tasks/WasmBuildTasks/GetChromeVersions.cs
index 3f29c0d99a8e1..4d0e1632348f0 100644
--- a/src/tasks/WasmBuildTasks/GetChromeVersions.cs
+++ b/src/tasks/WasmBuildTasks/GetChromeVersions.cs
@@ -292,7 +292,7 @@ private async Task<Stream> GetDownloadFileStreamAsync(string filename, string ur
             {
                 Log.LogMessage(MessageImportance.Low, $"Downloading {url} ...");
                 using Stream stream = await s_httpClient.GetStreamAsync(url).ConfigureAwait(false);
-                using FileStream fs = File.OpenWrite(filePath);
+                using FileStream fs = new FileStream(filePath, FileMode.Create, FileAccess.Write, FileShare.None);
                 await stream.CopyToAsync(fs).ConfigureAwait(false);
             }
             catch (HttpRequestException hre)
diff --git a/src/tools/illink/src/linker/Linker/DgmlDependencyRecorder.cs b/src/tools/illink/src/linker/Linker/DgmlDependencyRecorder.cs
index eed05fc710848..0e862b62b73cd 100644
--- a/src/tools/illink/src/linker/Linker/DgmlDependencyRecorder.cs
+++ b/src/tools/illink/src/linker/Linker/DgmlDependencyRecorder.cs
@@ -38,7 +38,7 @@ public DgmlDependencyRecorder (LinkContext context, string? fileName = null)
 				Directory.CreateDirectory (context.OutputDirectory);
 			}
 
-			var depsFile = File.OpenWrite (fileName);
+			var depsFile = new FileStream(fileName, FileMode.Create, FileAccess.Write, FileShare.None);
 			stream = depsFile;
 
 			writer = XmlWriter.Create (stream, settings);
diff --git a/src/tools/illink/src/linker/Linker/XmlDependencyRecorder.cs b/src/tools/illink/src/linker/Linker/XmlDependencyRecorder.cs
index 6c386ac367c9b..189e6fa274efa 100644
--- a/src/tools/illink/src/linker/Linker/XmlDependencyRecorder.cs
+++ b/src/tools/illink/src/linker/Linker/XmlDependencyRecorder.cs
@@ -61,7 +61,7 @@ public XmlDependencyRecorder (LinkContext context, string? fileName = null)
 				Directory.CreateDirectory (context.OutputDirectory);
 			}
 
-			var depsFile = File.OpenWrite (fileName);
+			var depsFile = new FileStream(fileName, FileMode.Create, FileAccess.Write, FileShare.None);
 			stream = depsFile;
 
 			writer = XmlWriter.Create (stream, settings);