NestedTemplateInline.json

{
  "$schema": "https://schema.management.azure.com/schemas/2015-01-01/deploymentTemplate.json#",
  "contentVersion": "1.0.0.0",
  "parameters": {},
  "variables": {},
  "resources": [
    {
      "apiVersion": "2015-01-01",
      "name": "nestedInlineTemplate",
      "type": "Microsoft.Resources/deployments",
      "properties": {
        "mode": "Incremental",
        "template": {
          "$schema": "https://schema.management.azure.com/schemas/2015-01-01/deploymentTemplate.json#",
          "contentVersion": "1.0.0.0",
          "resources":[],
          "outputs": {
            "example": {
              "type": "array",
              "copy": [
                {
                  "name": "value",
                  "count": 2,
                  "input": {"innerValue": "[copyIndex('value')]"}
                }
              ]
            }
          }
        }
      }
    }
  ],
  "outputs": {
    "nestedDeployment": {
      "type": "array",
      "value": "[reference('nestedInlineTemplate').outputs.example.value]"
    }
  }
}