diff --git a/runtime/core/cmake/onnx.cmake b/runtime/core/cmake/onnx.cmake
index bd55402cb..919511d45 100644
--- a/runtime/core/cmake/onnx.cmake
+++ b/runtime/core/cmake/onnx.cmake
@@ -12,8 +12,13 @@ if(ONNX)
       set(URL_HASH "SHA256=5d503ce8540358b59be26c675e42081be14a3e833a5301926f555451046929c5")
     endif()
   elseif(${CMAKE_SYSTEM_NAME} STREQUAL "Darwin")
-    set(ONNX_URL "https://github.com/microsoft/onnxruntime/releases/download/v${ONNX_VERSION}/onnxruntime-osx-x86_64-${ONNX_VERSION}.tgz")
-    set(URL_HASH "SHA256=09b17f712f8c6f19bb63da35d508815b443cbb473e16c6192abfaa297c02f600")
+    if(CMAKE_SYSTEM_PROCESSOR MATCHES "arm64")
+      set(ONNX_URL "https://github.com/microsoft/onnxruntime/releases/download/v${ONNX_VERSION}/onnxruntime-osx-arm64-${ONNX_VERSION}.tgz")
+      set(URL_HASH "SHA256=23117b6f5d7324d4a7c51184e5f808dd952aec411a6b99a1b6fd1011de06e300")
+    else()
+      set(ONNX_URL "https://github.com/microsoft/onnxruntime/releases/download/v${ONNX_VERSION}/onnxruntime-osx-x86_64-${ONNX_VERSION}.tgz")
+      set(URL_HASH "SHA256=09b17f712f8c6f19bb63da35d508815b443cbb473e16c6192abfaa297c02f600")
+    endif()
   else()
     message(FATAL_ERROR "Unsupported CMake System Name '${CMAKE_SYSTEM_NAME}' (expected 'Windows', 'Linux' or 'Darwin')")
   endif()